High Performance Compact Coating Unit - p411

High performance compact coating unit

General Information

• Compact hard coating unit
• Based on PLATIT LARC® , CERC® and SCiL® technologies (LAteral Rotating Cathodes, • CEntral Rotating Cathodes and Sputtered Coatings induced by LARC-GD®)
• Coating on tool steels (TS) above 230 °C, high speed steels (HSS) 350-500 °C and on tungsten carbide (WC) between 350-550 °C
• Reconfigurable by the user into different cathode setups:

A: 3 LARC® cathodes and 1 CERC® cathode
B: 3 LARC® cathodes (p411-ECO)
C: 3 LARC® cathodes and 1 SCiL® cathode

Coatings

• Monolayers, Multilayers, Nanogradients, Nanolayers, Nanocomposites, TripleCoatings3®, QuadCoatings4®, SCiL®-Coatings and their combinations
• Main standard coatings: AlCrN3®, nACRo4®, AlTiCrN4®, ALL4®
• All TripleCoatings3® available
• All QUADCoatings4® available
• All SCiL®-Coatings available

Hardware

• Foot print: W2720 x D1721 x H2149 mm
• Vacuum chamber, internal sizes: W650 x D670 x H675 mm
• Coatable volume: Ø500 x H460 mm
• Max. load: 200 kg
• System with turbo molecular pump
• Revolutionary rotating (tubular) cathode system with 3 LARC® / CERC® cathodes:
• Magnetic Coil Confinement (MACC) for ARC control
• LARC® : Up to 200A ARC current
• Changing time for skilled operator: approx. 15-30 min/cathode
• CERC® : Up to 300A ARC current
• SCiL® : Up to 30 kW sputtering power
• VIRTUAL SHUTTER® and TUBE SHUTTER® for all LARC cathodes
• Ionic plasma cleaning:
• etching with gas (Ar/H2); glow discharge
• metal ion etching (Ti, Cr)
• LGD® : LARC® Glow Discharge
• Pulsed BIAS supply (350 kHz)
• 6 (+1) gas channels, 6 MFC controlled
• Special dust filters for heaters (24 kW)
• Electrical connection: 3x400 V, 160 A, 50-60 Hz
• Total power consumption: < 76 kVA

Eletronics and Software

• Control system with touch-screen menu driven concept
• No programming knowledge is required for control
• Data logging and real-time viewing of process parameters
• Remote diagnostics and control
• Insite operator's manual and on CD-ROM
• Enhanced operating software compatible to p111 and p211

Minimum Cycle Times
for Optimum Conditions*

• Shank tools (2 µm): ø 10 x 70 mm, 504 pcs: 4 h
• Inserts (3 µm): ø 20 x 6 mm, 2940 pcs: 4.5 h
• Hobs (4 µm): ø 80 x 180 mm, 28 pcs: 6 h
*: The cycle times can be achieved under the following conditions:

• solid carbide tools (no outgassing necessary)
• high quality cleaning before the coating process (short etching)
continuous operation (pre-heated chamber)
• 4-cathode processes
• use of fast cooling (e.g. with helium, opening the chamber at 200°C)
• 5 (up to 6) batches / day

Coating types

TiN | Nitrides
TiCN-grey | Nitrides
TiAlN / AlTiN | Nitrides
CrN | Nitrides
CrTiN | Nitrides
ZrN | Nitrides
AlCrN | Nitrides
AlTiCrN | Nitrides
nACo® | Nitrides
nACRo® | Nitrides
nACo3® | Nitrides
nACRo3® | Nitrides
TiXCo3® | Nitrides
AlCrN3® | Nitrides
AlTiCrN3® | Nitrides
nACo4® | Nitrides
nACRo4® | Nitrides
TiXCo4® | Nitrides
nACoX4® | OXI
AlTiCrN4® | Nitrides
AlCrTiN4®=ALL4® | Nitrides
TiN-SCiL | SCiL
TiCN-SCiL | SCiL
TiB2-SCiL | SCiL

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