Diamond Like Coatings - p211

| Dedicated unit for DLC3; Diamond Like Coatings
General Information

• Dedicated coating unit for DLC³ (ta-C) coatings
• Based on PLATIT LARC® technology (LAteral Rotating Cathodes)
• Coating temperature 50°C to 500°C

psCOAT® - New Innovation

• p smooth COATING: Straight forward ARC filtering

DLC3 Coatings

• Standard coatings: VIc3®, cVIc3®, CROMVIc3®
• Configurations for hard nitride coatings and DLC2 in development

Hardware

• Foot print: W1890 x D1598 x H2619 mm
• Vacuum chamber with internal sizes of: W450 x D320(460) x H615 mm
•Max. size of coatable parts: Ø355 x H500 mm
• Coatable volume: Ø355 x H460 mm
•Max. load: 100 kg
•Turbo molecular pump
• Revolutionary rotating (tubular) cathode system with 2 LARC® cathodes:
• LARC® target size: Ø96 x 510 mm
• Magnetic Coil Confinement (MACC) for ARC control
• Double wall, stainless steel, water cooled chamber and cathodes
• Changing time for skilled operator: approx. 15 min / cathode
• VIRTUAL SHUTTER® and TUBE SHUTTER®
• LGD® : LARC® Glow Discharge
• Ionic plasma cleaning:
• etching with gas (Ar); glow discharge,
• metal ion etching (Ti, Cr)
• Pulsed BIAS supply (350 kHz / 30 kHz)
• Air conditioning for the electric cabinet
• 5 (+1) gas channels, 5 MFC controlled
• Electrical connection: 3x400V, 80A external fuse 50-60 Hz, 34 kVA

Electronics and Software

• Control system with touch-screen menu driven concept
• No programming knowledge is required for control
• Data logging and real-time viewing of process parameters
• Remote diagnostics and control
• Insite operator's manual and on CD-ROM
• Enhanced operating software compatible to p411

Cycle Times

Depending on the coating temperature 3 - 8 hours

Coating types
cVIc® | DLC
CROMVIc® | DLC

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