Coating Unit For Nanocomposite Coatings - π111

The new generation of the first industry-coating unit for Nanocomposite coatings

General Information

• Compact hardcoating unit
• Based on PLATIT LARC® technology (LAteral Rotating Cathodes)
• Coating on tool steels (TS) above 230 °C, high speed steels (HSS) 350 - 500 °C and on tungsten carbide (WC) between 350 - 550 °C
Hard Coatings

• Monolayers, Multilayers, Nanogradients, Nanolayers, Nanocomposites and their combinations
• Main standard coatings: TiN, AlTiN-G, nACo®
• Selected TripleCoatings3® available

Hardware

• Foot print: W1890 x D1500 x H2120 mm
• Vacuum chamber with internal sizes of: W450 x D320(460) x H615 mm
• Max. size of coatable parts: Ø355 x H500 mm
• Usable plasma volume: Ø355 x H460 mm
• Max. load: 100 kg
• Turbo molecular pump
• Revolutionary rotating (tubular) cathode system with 2 LARC® cathodes:
• LARC® target size: Ø96 x 510 mm
• Magnetic Coil Confinement (MACC) for ARC control
• Double wall, stainless steel, water cooled chamber and cathodes
• Changing time for skilled operator: approx. 15 min / cathode
• VIRTUAL SHUTTER® and TUBE SHUTTER®
• LGD® : LARC® Glow Discharge
• Ionic plasma cleaning:
• etching with gas (Ar/H2); glow discharge,
• metal ion etching (Ti, Cr)
• Pulsed BIAS supply (350 kHz)
• Air conditioning for the electric cabinet
• 5 (+1) gas channels, 5 MFC controlled
• Special dust filters for heaters (10 kW)
• Electrical connection: 3x400V, 100A external fuse 50-60 Hz, 30 kVA

Electronics and Software

• Control system with touch-screen menu driven concept
• No programming knowledge is required for control
• Data logging and real-time viewing of process parameters
• Remote diagnostics and control
• Insite operator's manual and on CD-ROM
• Enhanced operating software compatible to π411

Minimum Cycle Times
for Optimum Conditions*

• Shank tools (2 μm): ø 10 x 70 mm, 288 pcs: 4 h
• Inserts (3 μm): ø 20 x 6 mm, 1680 pcs: 4.5 h
• Hobs (4 μm): ø 80 x 180 mm, 20 pcs: 6 h
*: The cycle times can be achieved under the following conditions:

• solid carbide tools (no outgassing necessary)
• high quality cleaning before the coating process (short etching)
• continuous operation (pre-heated chamber)
• 2-cathode processes
• use of fast cooling (e.g. with helium, opening the chamber at 200°C)
• 4 (up to 5) processes / day

Coating types

TiN | Nitrides
TiCN-grey | Nitrides
TiAlN / AlTiN | Nitrides
CrN | Nitrides
CrTiN | Nitrides
ZrN | Nitrides
AlCrN | Nitrides
AlTiCrN | Nitrides
nACo® | Nitrides
nACRo® | Nitrides
cVIc® | DLC
CROMVIc® | DLC
CROMTIVIc® | DLC
nACVIc® | DLC
TiXCo3® | Nitrides
AlCrN3® | Nitrides
AlTiCrN3® | Nitrides

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