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Roll To Roll Vertical Process Tool - FLEX6000

FLEX6000- Roll to roll vertical process tool, with deposition up to 8" (6008) and 14" (6014) wide rolls. Processes include PECVD, HWCVD and Sputtering with a cold drum or 400°C web heating capability. Web materials include, Plastic, metal, Kapton, etc. State of the art thin film process recipe for various thin films.

Example of FLEX6014- four (4) multi-source magnetron sputtering zones, includes vertical sideways deposition on to 14" wide rolls.

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Stand Alone Single Chamber Tool - FLEX1000 | Stand Alone Multi - Process Tool - FLEX2000
Multi - Process Cluster Tool - FLEX3000 | Inline Multi - Process Tool - FLEX5000
Roll To Roll Vertical Process Tool - FLEX6000 | Substrate Load / Unload Module - FLEX1200

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Roll To Roll Vertical Process Tool - FLEX6000

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